课题组面向自主研发的国家重点战略发展需求，开展新型微纳制造技术基础理论和应用研究，以及面向应用场景的微纳器件（MEMS、NEMS）和高频集成电路器件的设计、制备、测试、系统集成与相关仪器系统的前沿性科学研究。课题组拥有面积约350平方米的微纳加工实验室和100平米的微纳测试表征实验室，拥有流变仪、纳米压印机、光刻机、匀胶机、快速退火、ICP刻蚀机、离子束刻蚀机、键合机和原子力显微镜、台阶仪、半导体参数测试仪、矢量网络分析仪、深能级瞬态谱仪和PL谱仪等一批科研设备。研究方向涵盖微纳米器件及系统、流体管道检测、金属微互联、微制造与测量技术等，实验室成员长期致力于微纳制造技术、IC器件、MEMS器件的研究与开发。近年来课题组在平台建设和人才培养方面取得了出色成绩，2018年获河南省高校科技创新团队，有多名研究生获得河南省优秀硕士论文、校级优秀论文以及研究生国家奖学金。在科研成果方面，团队承担科技部项目1项、国家自然科学基金6项、省级项目7项，企业委托横向项目5向，教学项目5项。近5年来发表相关论文40余篇，授权专利12项。主要研究方向包括：
（1）. 纳米压印技术（Nanoimprint Lithegraphy）；
（2）. 高频集成电路器件（HEMT）；
（3）. 输流管道自供电、自检测方法及器件（MEMS、NEMS）；
（4）. 微纳硅基光集成器件；
（5）. 微纳位置探测器件结构及工艺；
课题组欢迎电子科学与技术、集成电路科学与工程、物理学等专业本科学生、研究生报考；欢迎电子科学与技术、集成电路科学与工程、机械电子工程、微纳科学技术等方向博士、博士后参加团队，共创未来；
联系人：段智勇，0371-67739622，13938511882；duanzhiyong@zzu.edu.cn
课题组成员：
段智勇 钟英辉 马刘红 李梦珂 董馨源
课题组在学研究生：姜丹丹（博士生），吴迪，夏晓玉，杨帆，胡梦文，郑宏波，陈盼迪，邓文豪，董恒洋，董建平，方雨馨，任学鑫，罗东升，李婷，张东辉，韩鑫龙，刘仁杰, 周炳铎，张奥，吴玉洁，和海鑫，侯京迪
课题组毕业研究生：孙树祥（博士生），张佳林（博士生），白永强，罗康，孙卫芳，李动节，赵利波，张慧敏，李天昊，刘超然，夏委委，李冬雪，王文，戴庆焰，王盼，蔡豫威，彭伟，上官磊，李求恩，贾斌，苗笛声，杨国鑫，陈利，李韦烨，邵倩倩，杨琳，张楠，付一凡，秦丽明，王海丽，李凯凯，王文斌，常明铭，杨博，孟圣皓，赵向前，靳雅楠, 柳博羽，于永利，呼振楠，屈锡淳，崔伟锋，贠欢庆，张辰，刘博，柳润坤，袁肖亭，
课题组主持项目：
1.国家资助博士后计划：c档，董鑫源，2024年1月-2025年12月；
2.国家自然科学基金青年项目：基于等离激元热电子捕获的TMDs位置灵敏探测器研究，2024年1月-2026年12月；
3.河南省自然科学基金重点项目：输流管道水锤能量层型电磁俘能MEMS 结构及弹性基袖套阵列，2023年1月-2025年12月；
4.红外探测全国重点实验室开放课题：基于选区外延技术的表面等离激元增强近红外光电探测器的研究,2024年1月-2026年12月；
5.国家自然科学基金面上项目：面向空间应用的InP基HEMT辐照损伤等效机理和特性等效模型研究，2023年1月-2026年12月；
6.国家科技部外专项目: 输流管道奇点检测方法、器件、固件及集成，2021.01-2022.12；
7.国家自然科学基金面上项目：基于假塑性金属纳米粒子流体的压缩式气压纳米压印研究，2012.1-2015.12；
8.国家自然科学基金青年项目：InP 基HEMT 辐照效应研究，2015.1-2017.12；
9.国家自然科学基金面上项目：太赫兹InP基HEMT抗质子辐照加固方法和机理研究，2018.1-2021.12；
10.国家自然科学基金联合基金：外场辅助和掺杂调控的金属纳米粒子互连热动力学及调控机理研究，2018.1-2020.12；
11.国家自然科学基金理论专项项目：掺杂无序耦合量子点输运的理论研究，2020.1-2020.12；
12.河南省高校科技创新团队：微纳加工与微纳器件，2018.1-2019.12；
13.河南省自然科学基金优秀青年项目：空间极端温度和辐照对毫米波低噪声放大芯片的协同效应和加固研究，2020.1-2022.12；
14.河南省自然科学基金青年项目：基于硅无结晶体管的随机掺杂量子点输运机制研究，2020.1-2022.12；
15.河南省自然科学基金青年项目：波长可调谐硅基混合激光器的研究，2020.1-2022.12；
16.河南省教育厅高等学校青年骨干教师资助计划：超材料微纳结构能流调控金属诱导晶化，时间：2014.1-2016.12
17.河南省教育厅高等学校青年骨干教师资助计划：辐照诱生缺陷对InAlAs/InGaAs/InAlAs量子阱影响机制研究，2019.10-2012.9；
18.河南省科技攻关项目：W波段抗辐照低噪声放大集成电路研制，2020.1-2022.12；
19.中国航天科技集团有限公司第五研究院: InP基器件样品制备及位移辐照测试，2021年11月-2022年12月；
20.中国航天科技集团有限公司第五研究院；InP器件质子辐照数值模拟仿真及多能量辐照测试对比，2022年12月-2023年12月；
21.中国科学院微电子研究所：InP基HEMT器件数值仿真及可靠性研究，2019年6月-2019年12月；
22.中国科学院微电子研究所：InP基HEMT器件缺陷表征研究，2021年12月-2022年3月；
23.北京智芯微电子科技有限公司：双腔接触式电容压力传感器器件结构仿真及制备工艺研究，2021年1月-2022年12；
课题组代表性成果（2018-至今）：
[1]. Fan Yang, Hengyang Dong, Zhiyong Duan, Liuhong Ma, Xinyuan Dong, Xiaoyu Xia, Di Wu, Mengwen Hu,Mengke Li*. Silicon-based Metallic Grating Structure for Zinc Oxide Surface Plasmon-polariton Nanolaser. IEEE PHOTONICS TECHNOLOGY LETTERS, VOL. 36, NO. 4, 235-238. 2024.
[2]. Wu Di, Xia Xiaoyu, Yang Fan, Hu Mengwen, Li Mengke, Dong Xinyuan, Ma Liuhong, Duan Zhiyong*. Sandwiched Electromagnetic Energy Harvester based on the Alternating North- and South-Orientation Magnet Array. Sensors and Actuators: A. Physical, Vol.365, 114907. 2024.
[3]. Xia Xiaoyu, Wu Di, Yang Fan, Hu Mengwen, Ma Liuhong, Li Mengke, Dong Xinyuan, Zhong Yinghui, Duan Zhiyong*. Analysis of Vibration Characteristics of Pipeline in Different Environments Based on Wavelet Transform. Journal of Pipeline Systems Engineering and Practice.Vol.15, No.1, 04023047. 2024.
[4]. Xia Xiaoyu, Wu Di, Yang Fan, Hu Mengwen, Ma Liuhong, Li Mengke, Dong Xinyuan, Duan Zhiyong*. Early underground pipeline collapse detection and optimization based on water hammer vibration signal. International Journal of Vessels and Piping. Vol.206, 105045. 2023.
[5]. Qianqian Shao, Guoxin Yang, Jianxin Jia, Liuhong Ma, Mengke Li, Yinghui Zhong, Haibin Sun, Changhui Jiang, Yuwei Chen*，Zhiyong Duan*. A Sensitivity Enhanced Touch Mode Capacitive Pressure Sensor with Double Cavities. Microsystem Technologies. Vol.29, No.5, 1-8. 2023.
[6]. Mengwen Hu, Pandi Chen, Xichun Qu, Mengke Li, Zhiyong Duan, Liuhong Ma*.Theoretical and experimental Investigation on Performance Enhancement Effect for a Novel Capacitive Pressure Sensor with Double-cavity, IEICE Electronics Express, Vol.20, No.13, 20230187, 2023
[7]. Yongli Yu, Boyu Liu, Fan Yang, Zhiyong Duan, Liuhong Ma, Yinghui Zhong, Mengke Li*, Design and fabrication of room temperature electrically pumped ZnO nanowire hybrid plasmonic lasers. IEEE PHOTONICS TECHNOLOGY LETTERS， Vol.35, No.16, 899-902. 2023.
[8]. Liu Boyu, Yu Yongli, Jiang Dandan, Hu Zhengnan, Ma Liuhong, Li Mengke, Zhong Yinghui, Duan Zhiyong*. Microwave sintering Ag nanoparticle interconnects infiltrated by silver acetate ammonia mixed solution. Journal of Materials Science: Materials in Electronics. Vol.34, No.2, 101. 2023.
[9]. Liu Boyu, Yu Yongli, Hu Zhennan, Li Mengke, Ma Liuhong, Sun Haibin, Jia Jianxin, Jiang Changhui, Zhong Yinghui, Chen Yuwei, Duan Zhiyong*. Ag metal interconnect wires formed by pseudoplastic nanoparticles fluid imprinting lithography with microwave assistant sintering. Nanotechnology, Vol.33, No.27, 275301. 2022.
[10]. Jialin Zhang, Peng Ding, Bo Mei, Shenghao Meng, Chen Zhang, Liuhong Ma, Zhi Jin, Yi Sun, Haiming Zhang, and Yinghui Zhong*. The effects and mechanisms of 2 MeV proton irradiation on InP-based high electron mobility transistors. Applied Physics Letters, 2022, 120: 103501.
[11]. Qu Xichun, FuYingchun, Duan Zhiyong, LiMengke, ZhongYinghui, Ma Liuhong*. Characterization and ohmic contact of hydrothermally synthesized vertical ZnO and Ag/ZnO nanowires. Materials Research Express, Vol.9, No.12, 125003. 2022.
[12]. Fu Yifan, Ma Liuhong*, Duan Zhiyong, Han Weihua. Effect of charge trapping on electrical characteristics of silicon junctionless nanowire transistor. Journal of Semiconductor, 43(5): 054101, 2022.
[13]. Nan Zhang, Ruiwen Liu, Yanmei Kong,Yuxin Ye, Xiangbin Du, Bo Cong, Lihang Yu, Zhiqiang Wang, Yang Dai, Wei Li, Binbin Jiao*, Zhiyong Duan*. Experimental Investigation of the Embedded Micro-Channel Manifold Cooling for Power Chips. Thermal Science. Vol.26, No.2B, 1531-1543. 2022
[14]. Chen Li, Duan Zhiyong*, Li Weiye, Yang Guoxin, Jia Jianxin, Ma Liuhong, Li Mengke, Zhong Yinghui, Sun Haibin, Jiang Changhui. Chen Yuwei. Physical Properties and Boundary Influence of Singularity in Fluid Pipelines Based on Vibration Wave's Transmission Characteristics. Journal of Pipeline Systems Eengeering and Practice. Vol.13, No.1, 04021066, 2022.
[15]. Yongli Yu, Boyu Liu, ZhiyongDuan, Liuhong Ma, YinghuiZhong, Mengke Li*. Rational design of ZnO nanowire laser on surface plasmonpolarition. Applied Optics, 2022, 61(27): 8115-8117.
[16]. Xiangqian Zhao, Bo Mei, Peng Ding, Jialin Zhang, Shenghao Meng, Chen Zhang, Liuhong Ma, Shuxiang Sun, Yinghui Zhong*, Zhi Jin. Thermal annealing behavior of InP-based HEMT damaged by proton irradiation, Solid-State Electronics, 2022, 193:108287.
[17]. Yang Guoxin, Shao Qianqian, Li Weiye, Yang Lin, Chen Li, Li Mengke, Ma Liuhong, Zhong Yinghui, Duan Zhiyong*. Ag interconnects enhanced polydimethylsiloxane microstructure for self-recovery fluid pipe energy harvester. Macromolecular Materials and Engineering. 2021, Vol.306, No.4, 2000666.
[18]. Jiajia Zhang, Peng Ding, Yanan Jin, Shenghao Meng, Xiangqian Zhao, Yanfei Hu, Yinghui Zhong*, and Zhi Jin, A comparative study on radiation reliability of composite channel InP high electron mobility transistors, Chinese Physics B, 2021, 30 (7): 070702.
[19]. Shenghao Meng, Shuxiang Sun, Peng Ding, Jiajia Zhang, Bo Yang, Zhichao Wei, Yinghui Zhong*, Zhi Jin. Electron radiation impact on the Kink effect in S22 of InP-based high electron mobility transistors, Semiconductor Science and Technology, 2021, 36(9):095029.
[20]. Shuxiang Sun, Xiaolong Fu, Long Wang, Ming E, Junjie Yi, Ruxian Yao, Xinyan Zheng, Haitao Wu, Fang Liu, Yinghui Zhong*, Yuxiao Li, Peng Ding, Zhi Jin. Electron irradiation effects on InP-based HEMTs with different gate widths, Journal of Ovonic Research, 2021, 17(5):411-420.
[21]. Shuxiang Sun, Yinghui Zhong*, Hongying Mei, Ruxian Yao, Fujun Chen, Yuxiao Li, Yanfei Hu. The effect of High-K passivation layer on off-state breakdown voltage of AlGaAs/InGaAs HEMT, Journal of Ovonic Research, 2021, 17(2):137-145.
[22]. Shuxiang Sun, Yinghui Zhong*, Yanfei Hu, Ruxian Yao. Enhancement of breakdown characteristics of AlGaN|GaN HEMT with back barrier plus high-k passivation layer, Physics of Semiconductor Devices, 2021, 55(10):1265-1274.
[23]. Xinyuan Dong, Diyuan Zheng, Jing Lu, Yiru Niu and Hui Wang*. Efficient Hot Electron Extraction in Ag-Cu/TiO2 for High Performance Lateral Photovoltaic Effect. IEEE Electron Device Letters, 2021, 42, 1500.
[24]. Xinyuan Dong, Diyuan Zheng, Jing Lu, Yiru Niu, Binbin Liu and Hui Wang*. Plasmon-enhanced lateral photovoltaic effect observed in Ag-ZnO core–shell nanoparticles. Applied Physics Letters, 2021, 118, 122101.
[25]. Xinyuan Dong, Diyuan Zheng, Jing Lu, Yiru Niu and Hui Wang*. Selectively enhanced violet and infrared position sensitive photodetectors based on RTA treated ZnO/Si. Applied Surface Science, 2021, 566, 150687.
[26]. Bo Yang, Jiajia Zhang, Peng Ding, Shuxiang Sun, Yanan Jin, Xiangqian Zhao, Shenghao Meng, Yanfei Hu, Yinghui Zhong*, Zhi Jin. PKA distributions in InAlAs and InGaAs materials irradiated by protons with different energies. Nuclear Instruments & Methods in Physics Research Section B- Beam Interactions with Materials and Atoms, 2020, 484:42-47.
[27]. Shuxiang Sun, Hehe Liu, Bo Yang, Mingming Chang, Yinghui Zhong*, Yuxiao Li, Peng Ding, Zhi Jin, Zhichao Wei. Effect of 1 MeV electron irradiation on gate contact characteristics of InP-based HEMTs. Materials Science in Semiconductor Processing, 2020, 114: 105084.
[28]. Sun Shuxiang, Yangbo, Zhong Yinghui*, Li Yuxiao, Ding Peng, Jin Zhi, Wei Zhichao. Degradation mechanisms of InP-based high-electron-mobility transistors under 1 MeV electron irradiation. Journal of Physics D: Applied Physics, 2020, 53(17): 175107.
[29]. Zhong Yinghui, Yang Bo, Chang Mingming, Ding Peng, Ma Liuhong, Li Mengke, Duan Zhiyong, Yang Jie*, Jin Zhi, Wei Zhichao. Enhancement of radiation hardness of InP-based HEMT with double Si-doped plane. Chinese Physics B, 2020, 29(3): 038502.
[30]. Zhong Yinghui, Wang Wenbin, Yang Jie, Sun Shuxiang, Chang Mingming, Duan Zhiyong, Jin Zhi*, Ding Peng. An improved empirical nonlinear model for InP-based HEMTs. Solid-State Electronics, 2020, 164: 107613.
[31]. Lin Yang, Liuhong Ma, YinghuiZhong, ZhiyongDuan, Mengke Li*, Simulation Design of Silicon Based Quantum Well NanolaserBased on Surface PlasmonPolariton. Journal of Optics, 2020, 22(9): 95002.
[32]. Bin Jia, Qiuen Li, Liuhong Ma, Mengke Li, Yinghui Zhong, Zhiyong Duan*．Magnetic field-assisted sintering of nickel-doped silver microwire to improve densification and conductivity. Journal of Magnetism and Magnetic Materials. Vol.513, 167232. 2020．
[33]. Lei Shangguan, Bin Jia, Qiuen Li, Mengke Li, Liuhong Ma, Yinghui Zhong, Yufeng Su, Zhiyong Duan*. Investigation on Anisotropy Shrinkage and Conductivity of Ag Microwires Sintering Assisted by the Tamping Effect of Alternating Electric Field. ECS Journal of Solid State Science and Technology. Vol.9, No.3, 034006. 2020.
[34]. Ma Liuhong, Han Weihua and Yang Fuhua. Coulomb blockade and hopping transport behaviors of donor-induced quantum dots in junctionless transistors. Chinese Physics B. 29(3): 038104, 2020.
[35]. Xinyuan Dong, Diyuan Zheng, Meng Yuan, Yiru Niu, Binbin Liu and Hui Wang*. Laser-Induced Abnormal Cryogenic Magnetoresistance Effect in a Corbino Disk. Physical Review Applied, 2020, 13, 064050.
[36]. Xinyuan Dong, Diyuan Zheng, Meng Yuan, Peiqi Zhou, Yiru Niu, Anhua Dong and Hui Wang*. Laser triggered large magnetoresistance change observed in Corbino disk of Cu/SiO2/Si. Advanced Electronic Materials. 2019, 5, 1800844.
[37]. Bin Jia, Lei Shangguan, Qiuen Li, Liuhong Ma, Mengke Li, Yinghui Zhong and Zhiyong Duan*. Improve anisotropy shrinkage and conductivity of Ag interconnected wires by non-contact ultrasonic field. Journal of Physics D: Applied Physics.Vol.52, No.37, 375103. 2019.
[38]. Qiuen Li, Mengke Li, Bin Jia, Lei Shangguan, Liuhong Ma, Yinghui Zhong, Yufeng Su, Zhiyong Duan*. Sintered Ag nanoparticle ink achieves 50% higher conductivity than bulk Ag in interconnections by doping with In. Applied Physics Express. Vol.12, No.5, 055004. 2019.
[39]. Peng Wei, Ma Liuhong, Li Mengke, Zhong Yinghui, Shangguan Lei, Cai Yuwei, Duan Zhiyong*. Design of seal ring with rectangular grooves for gas isolation in Nanoimprint Lithography. Proceedings of the Institution of Mechanical Engineers, Part C, Journal of Mechanical Engineering Science. Vol. 233, No.3, 1079-1086. 2019.
[40]. Sun Shuxiang, Ding Peng, Jin Zhi, Zhong Yinghui*, Li Yuxiao, Wei Zhichao. Effect of electron irradiation fluence on InP-based high electron mobility transistors. Nanomaterials, 2019, 9(7): 967.
[41]. Sun Shuxiang, Chang Mingming, Li Mengke, Ma Liuhong, Zhong Yinghui*, Li Yuxiao, Ding Peng, Jin Zhi, Wei Zhichao. Effect of defects properties on InP-based high electron mobility transistors. Chinese Physics B, 2019, 28(7): 078501.
[42]. Shangguan Lei, Ma Liuhong, Li Mengke, Peng Wei, Zhong Yinghui, Su, Yufeng, Duan Zhiyong*. Study on the shrinkage behavior and conductivity of silver microwires during electrostatic field assisted sintering. Journal of Physics D: Applied Physics. Vol.51, No.18. 185603. 2018.
[43]. Ma Liuhong, Han Weihua, Zhao Xiaosong, Guo Yangyan, Dou Yamei and Yang Fuhua, Influence of dopant concentration on electrical quantum transport behaviors in junctionless nanowire transistors, Chinese Physics B, 27(8): 088106, 2018.
[44]. Sun Shuxiang, Chang Mingming, Zhang Chao, Cheng Chao, Li Yuxiao, Zhong Yinghui*, Ding Peng, Jin Zhi, Wei Zhichao. Proton irradiation effect on InP-based high electron mobility transistor by numerical simulation with non-uniform induced acceptor-like defects. Physica Status Solidi-Rapid Research Letters, 2018, 12(6): 1800027.
[45]. Sun Shuxiang, Wei Zhichao, Xia Penghui, Wang Wenbin, Duan Zhiyong, Li Yuxiao, Zhong Yinghui*, Ding Peng, Jin Zhi. Effects of proton irradiation at different incident angles on InAlAs/InGaAs InP-based HEMTs. Chinese Physics B, 2018, 27(2): 028502.
[46]. Zhong Yinghui*, Li Kaikai, Li Mengke, Wang Wenbin, Sun Shuxiang, Li Huilong, Ding Peng, Jin Zhi. An improved 16-element small-signal model for InP-based HEMTs. Journal of Infrared and Millimeter Waves, 2018, 37(2): 171-175.
中国专利：
1.钟英辉;李凯凯;陆泽营;王海丽;孙树祥. 修复InP基HEMT器件质子辐照损伤的微波退火装置及方法,授权, 2018.02,ZL 201610103300.1.
2.钟英辉;王文斌;孙树祥;王海丽;李凯凯;陆泽营;夏鹏辉. 基于BCB钝化的抗质子辐照InP基HEMT器件及其加工方法,授权, 2019.12,ZL 201710261115.X.
3.钟英辉;张佳佳;靳雅楠;赵向前;孟圣皓. 基于氮化铝/氮化硅堆叠结构和BCB桥的抗质子辐照InP基HEMT器件,受理,2020.03, 20201024787.6.
4.钟英辉;张佳佳;赵向前;靳雅楠;孟圣皓. 一种基于复合沟道和双掺杂层的抗质子辐照InP基HEMT器件及其加工方法,受理, 2020.03,202010242492.7.
5.钟英辉;张斌;段智勇;马刘红;李梦珂. 太赫兹InP基HEMT器件抗质子辐照加固虚拟仿真实验软件1.0.中国软件著作权, 2020.10, 2021SR11066881.
6.钟英辉;刘博;张佳林;张辰;贠欢庆. HEMT器件跨导和阈值电压辐照退化提取及其图像快速绘制软件V1.0.中国软件著作权,2021.02,2022SR0199910.
7.钟英辉;赵向前;刘博;张佳林;柳润坤. HEMT器件饱和电流退火修复提取及其图像快速绘制软件V1.0.中国软件著作权, 2021.02, 2022SR0193287.
8.王晓霞, 姜丹丹, 呼振楠, 柳博羽, 李梦珂, 马刘红, 钟英辉, 段智勇, 郑国恒, 刘忠侠. 一种输流管道奇点特征智能检测方法. 授权日期：2023.04.25. 中国，ZL 202111483120.8.
9.段智勇，李韦烨，杨国鑫，邵倩倩，李梦珂，马刘红，钟英辉，郑国恒. 多能量发电微纳囊及采能阵列.授权日期：2020.12.18. ZL 202010258244.5.
10.段智勇，陈利，杨国鑫，邵倩倩，马刘红，李梦珂，钟英辉，郑国恒. 流体输运管道适用的发电微纳囊及采能阵列. 授权日期：2020.12.01. ZL202010258261 .9.
11.段智勇，邵倩倩，李韦烨，杨琳，李梦珂，马刘红，钟英辉，苏宇锋，郑国恒. 一种振动波微纳电容传感器及流体管道振动波监测阵列. 授权日期：2020.01.02, 中国，201811568740.X
12.段智勇，杨国鑫，陈利，杨琳，李梦珂，马刘红，钟英辉，苏宇锋，郑国恒. 流体输运管道节点适用的多能量发电微纳囊及采能阵列. 授权日期：2019.12.25, 中国，ZL201811425304.7
13.段智勇，贾斌，李梦珂，马刘红，钟英辉，苏宇锋，郑国恒. 一种调控金属互连线各向异性收缩率的方法. 授权日期：2019.12.18,中国， ZL201711217161.6.
14.段智勇，李求恩，马刘红，李梦珂，钟英辉，苏宇锋，郑国恒. 一种低温掺杂调控热熔Ag金属纳米粒子微纳互连线性能的方法. 授权日期：2019.06.28, 中国，ZL 201711214461.9.
15.马刘红、屈锡淳、胡梦文、李梦珂、段智勇. 一种硅基横向氧化锌电导型气体传感器.授权日期：2022.09.20, ZL202220067968.6
16.付一凡、马刘红、段智勇、邵倩倩、钟英辉、李梦珂. 一种无结场效应晶体管式压力传感器及其制备方法.授权日期：2022.09.02, ZL202010094292.
17.王晓霞，姜丹丹，呼振楠，柳博羽，李梦珂，马刘红，钟英辉，段智勇，郑国恒，刘忠侠. 一种输流管道奇点特征智能检测方法. 授权日期：2023.04.25. ZL 202111483120.8.
实验室部分设备：
100级洁净室 DRIE SPTS ICP SR 键合机 SB6/8 Gen2 ICP刻蚀机
PL谱仪 流变仪 RTP快速热处理器 AFM原子力显微镜
XP 200 台阶仪 半导体参数测试仪 光刻机 深能级瞬态谱仪
