课题组面向自主研发的国家重点战略发展需求，开展新型微纳制造技术基础理论和微纳器件应用研究，以及面向应用场景的微纳器件（MEMS、NEMS）和集成电路器件的设计、制备、测试、系统集成与相关仪器系统的前沿性科学研究。课题组拥有面积约336平方米的微纳加工实验室(整体1000级、局部100级)和111平米的研究实验室，拥有流变仪、纳米压印机、光刻机、匀胶机、快速退火RTP、ICP刻蚀机、离子束刻蚀机DRIE、键合机和原子力显微镜、台阶仪、探针台和微波热处理等一批科研设备。研究方向涵盖微纳米器件及系统、流体管道检测方法及器件、Ag金属微互连、微制造与测量技术等，实验室成员长期致力于微纳制造技术、IC器件、MEMS器件的研究与开发。近年来课题组在平台建设和人才培养方面取得了出色成绩，2018年获河南省高校科技创新团队，有多名研究生获得河南省优秀硕士论文、校级优秀论文以及研究生国家奖学金。在科研成果方面，团队承担科技部项目1项、国家自然科学基金4项、省级项目7项，企业委托横向项目5向，教学项目5项。近5年来发表相关论文30余篇，授权专利12项。主要研究方向包括：

（1）. 纳米压印技术（Nanoimprint Lithegraphy）；

（2）. 微纳电子器件（FinFET、GAAFET）；

（3）. 输流管道漏前智能检测方法及器件（集能MEMS、测试MEMS）；

（4）. 微纳硅基光集成器件（MOEMS）；

（5）. 微纳位置探测器件结构及工艺（MOEMS）；

课题组欢迎电子科学与技术、集成电路科学与工程、物理学等专业本科学生、研究生报考；欢迎电子科学与技术、集成电路科学与工程、机械电子工程、微纳科学技术等方向博士、博士后参加团队，共创未来；

联系人：段智勇，0371-67739622，13938511882；duanzhiyong@zzu.edu.cn

课题组成员：

   段智勇         马刘红           李梦珂          董馨源          李柘黄

课题组在校研究生：姜丹丹（博士生），郑宏波，陈盼迪，邓文豪，董恒洋，周炳铎，张奥，吴玉洁，和海鑫，侯京迪，高文君，李普光，孙晨畅

课题组毕业研究生：白永强，罗康，孙卫芳，李动节，赵利波，张慧敏，李天昊，刘超然，夏委委，李冬雪，王文，戴庆焰，王盼，蔡豫威，彭伟，上官磊，李求恩，贾斌，苗笛声，杨国鑫，陈利，李韦烨，邵倩倩，杨琳，张楠，付一凡，秦丽明，柳博羽，于永利，呼振楠，屈锡淳，崔伟锋，吴迪，夏晓玉，杨帆，胡梦文

课题组主持项目：

    1.国家自然科学基金青年项目：高响应度的介质共振超表面硅基铟镓砷异质集成光电探测器机理与技术研究. 202501-202712；

2.中国博士后科学基金第75批面上项目：Ag/TiO2界面等离激元热电子转移对位置灵敏光电特性的影响研究，202407-202506；

3.国家资助博士后计划：C档，202401-202512；

4.国家自然科学基金青年项目：基于等离激元热电子捕获的TMDs位置灵敏探测器研究，202401-202612；

5.河南省自然科学基金重点项目：输流管道水锤能量层型电磁俘能MEMS 结构及弹性基袖套阵列，2023010-202512；

6.红外探测全国重点实验室开放课题：基于选区外延技术的表面等离激元增强近红外光电探测器的研究,202401-202612；

7.工程电介质及其应用教育部重点实验室开放课题：基于PbS QDs/ZnO电磁场检测与研究，202401-202512； 

8.国家科技部外专项目: 输流管道奇点检测方法、器件、固件及集成，202101-202212；

9.国家自然科学基金面上项目：基于假塑性金属纳米粒子流体的压缩式气压纳米压印研究，201201-201512；

10.国家自然科学基金联合基金：外场辅助和掺杂调控的金属纳米粒子互连热动力学及调控机理研究，201801-202012；

11.国家自然科学基金理论专项项目：掺杂无序耦合量子点输运的理论研究，202001-202012；

12.河南省高校科技创新团队：微纳加工与微纳器件，201801-201912；

13.河南省自然科学基金青年项目：基于硅无结晶体管的随机掺杂量子点输运机制研究，202001-202212；

14.河南省自然科学基金青年项目：波长可调谐硅基混合激光器的研究，202001-202212；

15.河南省教育厅高等学校青年骨干教师资助计划：超材料微纳结构能流调控金属诱导晶化，201401-201612；

16.北京市自然科学基金-昌平创新联合基金：MEMS器件玻璃通孔封装关键技术研究. 202410-202709； 

17.北京智芯微电子科技有限公司：双腔接触式电容压力传感器器件结构仿真及制备工艺研究，202101-202212；

课题组代表性成果（2018-至今）：

       [1]. Diyuan Zheng, Wenhao Deng, Zhiyong Duan, Lin Dong, and Xinyuan Dong*, Using TiO2 to capture hot electrons for self-powered position-sensitive photodetection, Optics Letters, 2024, 49, 5367-5370. 

       [2]. Wenhao Deng, Diyuan Zheng, Liuhong Ma, Mengke Li, Zhiyong Duan, Lin Dong, and Xinyuan Dong*，Plasmon-Induced Ag-Decorated ZnO Nanowires for Self-Powered Position Sensing, ACS Applied Nano Materials, 2024, 7, 19279-19287.

       [3]. Xinyuan Dong and Diyuan Zheng*, Effect of Ag layer thickness on lateral photovoltaic mechanisms in Ag/p-Si structures, Physica Scripta, 2024, 99, 035517. 

       [4].Pandi Chen, Qianqian Shao, Xichun Qu, and Liuhong Ma*，Sensitivity enhancement of lateral zinc oxide nanowire gas sensors. APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, Vol. 130, No. 8, 2024；

[5]. Fan Yang, Hengyang Dong, Zhiyong Duan, Liuhong Ma, Xinyuan Dong, Xiaoyu Xia, Di Wu, Mengwen Hu,Mengke Li*. Silicon-based Metallic Grating Structure for Zinc Oxide Surface Plasmon-polariton Nanolaser. IEEE PHOTONICS TECHNOLOGY LETTERS, VOL. 36, NO. 4, 235-238. 2024.

[6]. Wu Di, Xia Xiaoyu, Yang Fan, Hu Mengwen, Li Mengke, Dong Xinyuan, Ma Liuhong, Duan Zhiyong*. Sandwiched Electromagnetic Energy Harvester based on the Alternating North- and South-Orientation Magnet Array. Sensors and Actuators: A. Physical, Vol.365, 114907. 2024.

[7]. Xia Xiaoyu, Wu Di, Yang Fan, Hu Mengwen, Ma Liuhong, Li Mengke, Dong Xinyuan, Zhong Yinghui, Duan Zhiyong*. Analysis of Vibration Characteristics of Pipeline in Different Environments Based on Wavelet Transform. Journal of Pipeline Systems Engineering and Practice.Vol.15, No.1, 04023047. 2024.

[8]. Xia Xiaoyu, Wu Di, Yang Fan, Hu Mengwen, Ma Liuhong, Li Mengke, Dong Xinyuan, Duan Zhiyong*. Early underground pipeline collapse detection and optimization based on water hammer vibration signal. International Journal of  Vessels and Piping. Vol.206, 105045. 2023.

[9]. Qianqian Shao, Guoxin Yang, Jianxin Jia, Liuhong Ma, Mengke Li, Yinghui Zhong, Haibin Sun, Changhui Jiang, Yuwei Chen*，Zhiyong Duan*. A Sensitivity Enhanced Touch Mode Capacitive Pressure Sensor with Double Cavities. Microsystem Technologies. Vol.29, No.5, 1-8. 2023.

[10]. Mengwen Hu, Pandi Chen, Xichun Qu, Mengke Li, Zhiyong Duan, Liuhong Ma*.Theoretical and experimental Investigation on Performance Enhancement Effect for a Novel Capacitive Pressure Sensor with Double-cavity, IEICE Electronics Express, Vol.20, No.13, 20230187, 2023

[11]. Yongli Yu, Boyu Liu, Fan Yang, Zhiyong Duan, Liuhong Ma, Yinghui Zhong, Mengke Li*, Design and fabrication of room temperature electrically pumped ZnO nanowire hybrid plasmonic lasers. IEEE PHOTONICS TECHNOLOGY LETTERS， Vol.35, No.16, 899-902. 2023.

[12]. Liu Boyu, Yu Yongli, Jiang Dandan, Hu Zhengnan, Ma Liuhong, Li Mengke, Zhong Yinghui, Duan Zhiyong*. Microwave sintering Ag nanoparticle interconnects infiltrated by silver acetate ammonia mixed solution. Journal of Materials Science: Materials in Electronics. Vol.34, No.2, 101. 2023.

[13]. Liu Boyu, Yu Yongli, Hu Zhennan, Li Mengke, Ma Liuhong, Sun Haibin, Jia Jianxin, Jiang Changhui, Zhong Yinghui, Chen Yuwei, Duan Zhiyong*. Ag metal interconnect wires formed by pseudoplastic nanoparticles fluid imprinting lithography with microwave assistant sintering. Nanotechnology, Vol.33, No.27, 275301. 2022.

[14]. Qu Xichun, FuYingchun, Duan Zhiyong, LiMengke, ZhongYinghui, Ma Liuhong*. Characterization and ohmic contact of hydrothermally synthesized vertical ZnO and Ag/ZnO nanowires.  Materials Research Express, Vol.9, No.12, 125003. 2022. 

[15]. Fu Yifan, Ma Liuhong*, Duan Zhiyong, Han Weihua. Effect of charge trapping on electrical characteristics of silicon junctionless nanowire transistor. Journal of Semiconductor, 43(5): 054101, 2022.

[16]. Nan Zhang, Ruiwen Liu, Yanmei Kong,Yuxin Ye, Xiangbin Du, Bo Cong, Lihang Yu, Zhiqiang Wang, Yang Dai, Wei Li, Binbin Jiao*, Zhiyong Duan*. Experimental Investigation of the Embedded Micro-Channel Manifold Cooling for Power Chips. Thermal Science. Vol.26, No.2B, 1531-1543. 2022

[17]. Chen Li, Duan Zhiyong*, Li Weiye, Yang Guoxin, Jia Jianxin, Ma Liuhong, Li Mengke, Zhong Yinghui, Sun Haibin, Jiang Changhui. Chen Yuwei. Physical Properties and Boundary Influence of Singularity in Fluid Pipelines Based on Vibration Wave's Transmission Characteristics. Journal of Pipeline Systems Eengeering and Practice. Vol.13, No.1, 04021066, 2022.

[18]. Yongli Yu, Boyu Liu, ZhiyongDuan, Liuhong Ma, YinghuiZhong, Mengke Li*. Rational design of ZnO nanowire laser on surface plasmonpolarition. Applied Optics, 2022, 61(27): 8115-8117.

[19]. Yang Guoxin, Shao Qianqian, Li Weiye, Yang Lin, Chen Li, Li Mengke, Ma Liuhong, Zhong Yinghui, Duan Zhiyong*. Ag interconnects enhanced polydimethylsiloxane microstructure for self-recovery fluid pipe energy harvester. Macromolecular Materials and Engineering. 2021, Vol.306, No.4, 2000666.

[20]. Xinyuan Dong, Diyuan Zheng, Jing Lu, Yiru Niu and Hui Wang*. Efficient Hot Electron Extraction in Ag-Cu/TiO2 for High Performance Lateral Photovoltaic Effect. IEEE Electron Device Letters, 2021, 42, 1500.

[21]. Xinyuan Dong, Diyuan Zheng, Jing Lu, Yiru Niu, Binbin Liu and Hui Wang*. Plasmon-enhanced lateral photovoltaic effect observed in Ag-ZnO core–shell nanoparticles. Applied Physics Letters, 2021, 118, 122101.

[22]. Xinyuan Dong, Diyuan Zheng, Jing Lu, Yiru Niu and Hui Wang*. Selectively enhanced violet and infrared position sensitive photodetectors based on RTA treated ZnO/Si. Applied Surface Science, 2021, 566, 150687.

[23]. Lin Yang, Liuhong Ma, YinghuiZhong, ZhiyongDuan, Mengke Li*, Simulation Design of Silicon Based Quantum Well NanolaserBased on Surface PlasmonPolariton. Journal of Optics, 2020, 22(9): 95002.

[24]. Bin Jia, Qiuen Li, Liuhong Ma, Mengke Li, Yinghui Zhong, Zhiyong Duan*．Magnetic field-assisted sintering of nickel-doped silver microwire to improve densification and conductivity. Journal of Magnetism and Magnetic Materials. Vol.513, 167232. 2020．

[25]. Lei Shangguan, Bin Jia, Qiuen Li, Mengke Li, Liuhong Ma, Yinghui Zhong, Yufeng Su, Zhiyong Duan*. Investigation on Anisotropy Shrinkage and Conductivity of Ag Microwires Sintering Assisted by the Tamping Effect of Alternating Electric Field. ECS Journal of Solid State Science and Technology. Vol.9, No.3, 034006. 2020.

[26]. Ma Liuhong, Han Weihua and Yang Fuhua. Coulomb blockade and hopping transport behaviors of donor-induced quantum dots in junctionless transistors. Chinese Physics B. 29(3): 038104, 2020.

[27]. Xinyuan Dong, Diyuan Zheng, Meng Yuan, Yiru Niu, Binbin Liu and Hui Wang*. Laser-Induced Abnormal Cryogenic Magnetoresistance Effect in a Corbino Disk. Physical Review Applied, 2020, 13, 064050.

[28]. Xinyuan Dong, Diyuan Zheng, Meng Yuan, Peiqi Zhou, Yiru Niu, Anhua Dong and Hui Wang*. Laser triggered large magnetoresistance change observed in Corbino disk of Cu/SiO2/Si. Advanced Electronic Materials. 2019, 5, 1800844.

[29]. Bin Jia, Lei Shangguan, Qiuen Li, Liuhong Ma, Mengke Li, Yinghui Zhong and Zhiyong Duan*. Improve anisotropy shrinkage and conductivity of Ag interconnected wires by non-contact ultrasonic field. Journal of Physics D: Applied Physics.Vol.52, No.37, 375103. 2019.

[30]. Qiuen Li, Mengke Li, Bin Jia, Lei Shangguan, Liuhong Ma, Yinghui Zhong, Yufeng Su, Zhiyong Duan*. Sintered Ag nanoparticle ink achieves 50% higher conductivity than bulk Ag in interconnections by doping with In. Applied Physics Express. Vol.12, No.5, 055004. 2019.

[31]. Peng Wei, Ma Liuhong, Li Mengke, Zhong Yinghui, Shangguan Lei, Cai Yuwei, Duan Zhiyong*. Design of seal ring with rectangular grooves for gas isolation in Nanoimprint Lithography. Proceedings of the Institution of Mechanical Engineers, Part C, Journal of Mechanical Engineering Science. Vol. 233, No.3, 1079-1086. 2019.

[32]. Shangguan Lei, Ma Liuhong, Li Mengke, Peng Wei, Zhong Yinghui, Su, Yufeng, Duan Zhiyong*. Study on the shrinkage behavior and conductivity of silver microwires during electrostatic field assisted sintering. Journal of Physics D: Applied Physics. Vol.51, No.18. 185603. 2018.

[33]. Ma Liuhong, Han Weihua, Zhao Xiaosong, Guo Yangyan, Dou Yamei and Yang Fuhua, Influence of dopant concentration on electrical quantum transport behaviors in junctionless nanowire transistors, Chinese Physics B, 27(8): 088106, 2018.

中国专利：

1.王晓霞, 姜丹丹, 呼振楠, 柳博羽, 李梦珂, 马刘红, 钟英辉, 段智勇, 郑国恒, 刘忠侠. 一种输流管道奇点特征智能检测方法. 授权日期：2023.04.25. 中国，ZL 202111483120.8.

2.段智勇，李韦烨，杨国鑫，邵倩倩，李梦珂，马刘红，钟英辉，郑国恒. 多能量发电微纳囊及采能阵列.授权日期：2020.12.18. ZL 202010258244.5.

3.段智勇，陈利，杨国鑫，邵倩倩，马刘红，李梦珂，钟英辉，郑国恒. 流体输运管道适用的发电微纳囊及采能阵列.  授权日期：2020.12.01. ZL202010258261 .9.

4.段智勇，邵倩倩，李韦烨，杨琳，李梦珂，马刘红，钟英辉，苏宇锋，郑国恒. 一种振动波微纳电容传感器及流体管道振动波监测阵列. 授权日期：2020.01.02, 中国，201811568740.X

5.段智勇，杨国鑫，陈利，杨琳，李梦珂，马刘红，钟英辉，苏宇锋，郑国恒. 流体输运管道节点适用的多能量发电微纳囊及采能阵列. 授权日期：2019.12.25, 中国，ZL201811425304.7

6.段智勇，贾斌，李梦珂，马刘红，钟英辉，苏宇锋，郑国恒. 一种调控金属互连线各向异性收缩率的方法. 授权日期：2019.12.18,中国， ZL201711217161.6.

7.段智勇，李求恩，马刘红，李梦珂，钟英辉，苏宇锋，郑国恒. 一种低温掺杂调控热熔Ag金属纳米粒子微纳互连线性能的方法. 授权日期：2019.06.28, 中国，ZL 201711214461.9.

8.马刘红、屈锡淳、胡梦文、李梦珂、段智勇. 一种硅基横向氧化锌电导型气体传感器.授权日期：2022.09.20, ZL202220067968.6

9.付一凡、马刘红、段智勇、邵倩倩、钟英辉、李梦珂. 一种无结场效应晶体管式压力传感器及其制备方法.授权日期：2022.09.02, ZL202010094292.

实验室部分设备：

                100级洁净室               DRIE  SPTS ICP SR               键合机  SB6/8 Gen2                        ICP刻蚀机 

             流变仪                    RTP快速热处理器            AFM原子力显微镜           电参数测试探针台

     XP 200 台阶仪                        光刻机                        微波热处理